InterLitho provides a full set of nanopatterning materials and consumables specialized for our nanopatterning systems. Many of these materials have been used in our lab for years with proven fabrication quality. We supply a wide range of substrates with pre-coated anti-reflection coatings for interference exposure. Starter kits are available for customers to quickly and easily gain hands-on experience on various patterning and nanofabrication processes. These standard materials and kits can also serve as the basis for customers to develop their own fabrication processes.
InterLitho provides a full set of nanopatterning materials and consumables specialized for our nanopatterning systems.
Anti-Reflection-Coated Patterning Substrates
The standing wave effect is undesirable in optical lithography processes where reﬂections from the substrate can cause unwanted variations in the resist proﬁle. Usually employing a layer of bottom anti-reflective (BAR) coating can minimize the influence caused by standing waves to ensure the quality and accuracy of the nanopatterns.
InterLitho offers standard and customizable BAR coating solutions according to substrate refractive indices, film thicknesses, and required feature sizes. Our multi-layer coating stack satisfies functions of both reducing the reflection and enhancing the etching selectivity to guarantee the uniformity and accuracy of feature sizes in entire nanofabrication processes.
Nanopatterning Materials and Consumables
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